Technical Ceramics

Semiconductor Processing

Morgan Technical Ceramics is a global market leader and specialises in supplying materials and components for manufacturing processes of semiconductors and other high quality demanding markets such as LED displays for more than 20 years.

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Semiconductor Applications

Morgan products are used in fabrication plants all over the world and helping semiconductor manufacturers to optimise their processes, increase production yield and help to reduce their total cost of ownership.

Our semiconductor components are used in applications including:

Wafer Production

High purity SiC source material for SiC boule product from which SiC wafers are produced

Deposition

Chamber liners

Edge rings

Gas mixing manifolds

Isolator and shield rings

Lift pads and pins

Plasma tubes

Dry Etch

Electrostatic chuck top layers

Focus ring

Showerheads, gas distribution plates

Ion-implant

Shield rings

Lithography

Lamp covers

Plasma tubes and light-source components

Thermal heat sinks

Wafer chucks

MOCVD

Chamber components (e.g. wafer carriers, wafer susceptors)

Rapid Thermal Processing (RTP)

Edge rings

Braze alloys

Wafer Handling

Charge dissipative end effectors

Wafer Inspection

Electrical insulator assemblies

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Semiconductor Products

We offer a wide range of products for the Semiconductor Process Equipment (SPE) industry including:

High-purity alumina chamber and lithography components
High-purity alumina targets
CVD SiC chamber and lithography components
CVD SiC targets
CVD SiC source material for growing single-crystal boules or ingots
High-purity alumina, ultra-high surface roughness coating

Semiconductor Materials

Our materials offer:

Plasma resistance
Low-particle shedding
High purity
High temperature dielectric performance
High Weibuell modulus aluminas

Semiconductor Processing Ceramics Questions

How is ceramic used in semiconductor processing equipment?

Ceramic components provide a clean surface, dimensional stability and resistance to degradation in semiconductor processing equipment such as chamber linings and rings.

Why are ceramics used in semiconductor processing equipment?

Morgan CVD SiC ceramic material has a unique combination of excellent thermal, electrical and chemical properties that makes it well-suited to applications across semiconductor industries where a high-performance material is required.

What are the advantages of Morgan semiconductor products?