Semiconductor Process Chambers

For over 60 years Morgan Technical Ceramics has been the premium supplier of custom ceramic components for chemical, electrical, mechanical, and vacuum applications.

We serve our semiconductor customers around the world. Our parts are typically manufactured from our developed and produced material compositions to customer defined designs.

Semiconductor Process Chambers Applications

• Lithography
• Implant
• CVD, PVD, Etch
• Flat panel display
  
  

Semiconductor Process Chambers Capabilities 

• Alumina (94 to 99.9%), aluminium nitride, fused silica
• Controlled microstructures
• Very high purity, consistency, and uniformity
• Low particle generation materials
• Sizes to one meter
• High tolerance ceramic machining/polishing
• Complete documentation and traceability
• CAD/EDI and engineering design support
• Metal/ceramic assemblies (susceptors, electrostatic chucks, etc.)
• Near net shape processing